Michael Turner

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Phosphorous-doped silicon dioxide process to customize contact etch...
- Patent number 7,064,087
- Issue date Jun 20, 2006
- Novellus Systems, Inc.
- Michael Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of inductively-coupled plasma in plasma-enhanced chemical vapor...
- Patent number 6,534,423
- Issue date Mar 18, 2003
- Novellus Systems, Inc.
- Michael Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...