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Michael Van Der Veen
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus for imaging a front side or a back side of a...
Patent number
7,480,028
Issue date
Jan 20, 2009
ASML Netherlands B.V.
Michael Van Der Veen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus, method of substrate identification, device...
Publication number
20050195378
Publication date
Sep 8, 2005
ASML NETHERLANDS B.V.
Michael Van Der Veen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY