Michael Varga

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Fallbrook, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Light collector mirror carrier
- Patent number 9,844,804
- Issue date Dec 19, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light collector mirror cleaning
- Patent number 9,073,098
- Issue date Jul 7, 2015
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Light Collector Mirror Carrier
- Publication number 20150273542
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
Light Collector Mirror Cleaning
- Publication number 20130306110
- Publication date Nov 21, 2013
- Cymer, Inc.
- Silvia De Dea
- B08 - CLEANING