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MICHAEL W. HAYES

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  • SAN JOSE, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Integrated ion implant scrubber system
    • Patent number 6,540,814
    • Issue date Apr 1, 2003
    • Advanced Technology Materials, Inc.
    • Michael W. Hayes
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Integrated ion implant scrubber system
    • Patent number 6,338,312
    • Issue date Jan 15, 2002
    • Advanced Technology Materials, Inc.
    • Michael W. Hayes
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Integrated ion implant scrubber system
    • Publication number 20020092421
    • Publication date Jul 18, 2002
    • Michael W. Hayes
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    INTEGRATED ION IMPLANT SCRUBBER SYSTEM
    • Publication number 20010008123
    • Publication date Jul 19, 2001
    • MICHAEL W. HAYES
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...