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Michael W. Lin
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Houston, TX, US
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last 30 patents
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Patent Grant
Fluorinated silazane release agents in nanoimprint lithography
Patent number
8,926,888
Issue date
Jan 6, 2015
Board of Regents, The University of Texas System
Carlton Grant Willson
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
FLUORINATED SILAZANE RELEASE AGENTS IN NANOIMPRINT LITHOGRAPHY
Publication number
20120217676
Publication date
Aug 30, 2012
Board of Regents, The University of Texas System
Carlton Grant Willson
B82 - NANO-TECHNOLOGY