Michael W. Pippins

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Hamilton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus having a substrate transport with a...
- Patent number 5,882,413
- Issue date Mar 16, 1999
- Brooks Automation, Inc.
- David Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batchloader for load lock
- Patent number 5,664,925
- Issue date Sep 9, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool batchloader of substrate carrier
- Patent number 5,613,821
- Issue date Mar 25, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batchloader for substrate carrier on load lock
- Patent number 5,607,276
- Issue date Mar 4, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS