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Michael W. Richter
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Closed loop control over delivery of liquid material to semiconduct...
Patent number
6,834,777
Issue date
Dec 28, 2004
Applied Materials, Inc.
Thomas H. Osterheld
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Closed loop control over delivery of liquid material to semiconduct...
Patent number
6,561,381
Issue date
May 13, 2003
Applied Materials, Inc.
Thomas H. Osterheld
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-function chamber for a substrate processing system
Patent number
6,435,868
Issue date
Aug 20, 2002
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling gas flow in a substrate processing system
Patent number
6,286,230
Issue date
Sep 11, 2001
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-function chamber for a substrate processing system
Patent number
6,193,507
Issue date
Feb 27, 2001
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-function chamber for a substrate processing system
Patent number
6,086,362
Issue date
Jul 11, 2000
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas flow control in a substrate processing system
Patent number
6,016,611
Issue date
Jan 25, 2000
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Closed loop control over delivery of liquid material to semiconduct...
Publication number
20030189060
Publication date
Oct 9, 2003
Applied Materials, Inc.
Thomas H. Osterheld
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-function chamber for a substrate processing system
Publication number
20010000747
Publication date
May 3, 2001
Applied Komatsu Technology, Inc.
John M. White
H01 - BASIC ELECTRIC ELEMENTS