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Michael Wenyoung TSIANG

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  • Fremont, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    PECVD process
    • Patent number 11,898,249
    • Issue date Feb 13, 2024
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tensile nitride deposition systems and methods
    • Patent number 11,710,631
    • Issue date Jul 25, 2023
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Systems and methods for analyzing defects in CVD films
    • Patent number 11,699,623
    • Issue date Jul 11, 2023
    • Applied Materials, Inc.
    • Mandar B. Pandit
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 11,613,812
    • Issue date Mar 28, 2023
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Hardmask tuning by electrode adjustment
    • Patent number 11,515,150
    • Issue date Nov 29, 2022
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Oxidation reduction for SiOC film
    • Patent number 11,133,177
    • Issue date Sep 28, 2021
    • APPLIED MATERIALS, INC.
    • Martin Jay Seamons
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method to enable high temperature processing without chamber drifting
    • Patent number 11,060,189
    • Issue date Jul 13, 2021
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    PECVD process
    • Patent number 10,793,954
    • Issue date Oct 6, 2020
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etch rate reduction of silicon nitride films
    • Patent number 10,515,796
    • Issue date Dec 24, 2019
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    VNAND tensile thick TEOS oxide
    • Patent number 10,483,282
    • Issue date Nov 19, 2019
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for PECVD overlay improvement
    • Patent number 10,236,225
    • Issue date Mar 19, 2019
    • Applied Materials, Inc.
    • Yoichi Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    VNAND tensile thick TEOS oxide
    • Patent number 10,199,388
    • Issue date Feb 5, 2019
    • APPLIED MATEERIALS, INC.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 10,060,032
    • Issue date Aug 28, 2018
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD apparatus and process
    • Patent number 10,030,306
    • Issue date Jul 24, 2018
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for PECVD overlay improvement
    • Patent number 9,947,599
    • Issue date Apr 17, 2018
    • Applied Materials, Inc.
    • Yoichi Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 9,816,187
    • Issue date Nov 14, 2017
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gate stack materials for semiconductor applications for lithographi...
    • Patent number 9,490,116
    • Issue date Nov 8, 2016
    • Applied Materials, Inc.
    • Michael Tsiang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    PECVD process
    • Patent number 9,458,537
    • Issue date Oct 4, 2016
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PECVD process
    • Patent number 9,157,730
    • Issue date Oct 13, 2015
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    SYSTEMS AND METHODS FOR ANALYZING DEFECTS IN CVD FILMS
    • Publication number 20230352349
    • Publication date Nov 2, 2023
    • Applied Materials, Inc.
    • Mandar B. Pandit
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20230193466
    • Publication date Jun 22, 2023
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Flowable CVD Film Defect Reduction
    • Publication number 20220375747
    • Publication date Nov 24, 2022
    • Applied Materials, Inc.
    • Wenhui Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HARDMASK TUNING BY ELECTRODE ADJUSTMENT
    • Publication number 20220130665
    • Publication date Apr 28, 2022
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS
    • Publication number 20220130661
    • Publication date Apr 28, 2022
    • Applied Materials, Inc.
    • Michael Wenyoung Tsiang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR ANALYZING DEFECTS IN CVD FILMS
    • Publication number 20220115275
    • Publication date Apr 14, 2022
    • Applied Materials, Inc.
    • Mandar B. Pandit
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20200399756
    • Publication date Dec 24, 2020
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    OXIDATION REDUCTION FOR SIOC FILM
    • Publication number 20200203154
    • Publication date Jun 25, 2020
    • Applied Materials, Inc.
    • Martin Jay SEAMONS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR DEPOSITING PHOSPHORUS-DOPED SILICON NITRIDE FILMS
    • Publication number 20200190664
    • Publication date Jun 18, 2020
    • Applied Materials, Inc.
    • Kesong HU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO ENABLE HIGH TEMPERATURE PROCESSING WITHOUT CHAMBER DRIFTING
    • Publication number 20200095677
    • Publication date Mar 26, 2020
    • Applied Materials, Inc.
    • Michael Wenyoung TSIANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VNAND TENSILE THICK TEOS OXIDE
    • Publication number 20190229128
    • Publication date Jul 25, 2019
    • Applied Materials, Inc.
    • Michael Wenyoung TSIANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DRY ETCH RATE REDUCTION OF SILICON NITRIDE FILMS
    • Publication number 20190157077
    • Publication date May 23, 2019
    • Applied Materials, Inc.
    • Michael Wenyoung TSIANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20180258535
    • Publication date Sep 13, 2018
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PECVD OVERLAY IMPROVEMENT
    • Publication number 20180226306
    • Publication date Aug 9, 2018
    • Applied Materials, Inc.
    • Yoichi SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20180066364
    • Publication date Mar 8, 2018
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PECVD OVERLAY IMPROVEMENT
    • Publication number 20170309525
    • Publication date Oct 26, 2017
    • Applied Materials, Inc.
    • Yoichi SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CLAMPING AND DECLAMPING SUBSTRATES USING E...
    • Publication number 20170162417
    • Publication date Jun 8, 2017
    • Applied Materials, Inc.
    • Zheng John YE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VNAND TENSILE THICK TEOS OXIDE
    • Publication number 20170062469
    • Publication date Mar 2, 2017
    • Applied Materials, Inc.
    • Michael Wenyoung TSIANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20170016118
    • Publication date Jan 19, 2017
    • Applied Materials, Inc.
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GATE STACK MATERIALS FOR SEMICONDUCTOR APPLICATIONS FOR LITHOGRAPHI...
    • Publication number 20160203971
    • Publication date Jul 14, 2016
    • Applied Materials, Inc.
    • Michael TSIANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20160017497
    • Publication date Jan 21, 2016
    • Applied Materials, Inc.
    • NAGARAJAN RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD APPARATUS AND PROCESS
    • Publication number 20150226540
    • Publication date Aug 13, 2015
    • Applied Materials, Inc.
    • Nagarajan Rajagopalan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PECVD PROCESS
    • Publication number 20140118751
    • Publication date May 1, 2014
    • Nagarajan RAJAGOPALAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...