Michael Widmann

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 9,604,299
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 8,705,006
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical arrangement for immersion lithography with a hydrophobic co...
- Patent number 8,279,402
- Issue date Oct 2, 2012
- Carl Zeiss SMT GmbH
- Stephan Six
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20150008215
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20090244508
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...
- Publication number 20090233233
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Stephan SIX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY