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Michael Wilhelmus Theodorus Koot
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Eindhoven, NL
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last 30 patents
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Patent Grant
Electromagnetic actuator, stage apparatus and lithographic apparatus
Patent number
8,687,171
Issue date
Apr 1, 2014
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Apparatus and method for contactless handling of an object
Patent number
8,616,598
Issue date
Dec 31, 2013
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY