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Michael William Kissick
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Madison, WI, US
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last 30 patents
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Patent Grant
Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion...
Patent number
5,711,812
Issue date
Jan 27, 1998
Varian Associates, Inc.
David LeRoy Chapek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...