Michael X. Yang

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,183,558
- Issue date Dec 31, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 12,174,616
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co. Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc lamp with forming gas for thermal processing systems
- Patent number 12,119,216
- Issue date Oct 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Triazolopyridinyl compounds as kinase inhibitors
- Patent number 12,110,290
- Issue date Oct 8, 2024
- Bristol-Myers Squibb Company
- Guanglin Luo
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 12,080,568
- Issue date Sep 3, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for hydrogen assisted atmospheric radical oxidation
- Patent number 12,014,920
- Issue date Jun 18, 2024
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
- Patent number 11,955,388
- Issue date Apr 9, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for workpiece processing
- Patent number 11,923,215
- Issue date Mar 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
- Patent number 11,837,447
- Issue date Dec 5, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system with transmission switch plate
- Patent number 11,812,523
- Issue date Nov 7, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sulfone pyridine alkyl amide-substituted heteroaryl compounds
- Patent number 11,787,779
- Issue date Oct 17, 2023
- Bristol-Myers Squibb Company
- Chunjian Liu
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods for the treatment of workpieces
- Patent number 11,791,181
- Issue date Oct 17, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch process using hydrofluoric acid and ozone gases
- Patent number 11,791,166
- Issue date Oct 17, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Qi Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Triazolopyridinyl compounds as kinase inhibitors
- Patent number 11,767,322
- Issue date Sep 26, 2023
- Bristol-Myers Squibb Company
- Guanglin Luo
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
- Patent number 11,764,072
- Issue date Sep 19, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arc lamp with forming gas for thermal processing systems
- Patent number 11,721,539
- Issue date Aug 8, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substituted bicyclic compounds
- Patent number 11,701,373
- Issue date Jul 18, 2023
- Bristol-Myers Squibb Company
- Alaric J. Dyckman
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Thermal processing system with temperature non-uniformity control
- Patent number 11,699,603
- Issue date Jul 11, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control system for adaptive control of a thermal processing system
- Patent number 11,644,817
- Issue date May 9, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
- Patent number 11,610,824
- Issue date Mar 21, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- G01 - MEASURING TESTING
Information Patent Grant
Heterocyclic compounds comprising pyridine useful as modulators of...
- Patent number 11,597,721
- Issue date Mar 7, 2023
- Bristol-Myers Squibb Company
- Zili Xiao
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods and apparatus for post exposure bake processing of a workpiece
- Patent number 11,586,113
- Issue date Feb 21, 2023
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen assisted atmospheric radical oxidation
- Patent number 11,521,847
- Issue date Dec 6, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 11,521,868
- Issue date Dec 6, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface pretreatment process to improve quality of oxide films prod...
- Patent number 11,495,437
- Issue date Nov 8, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone for selective hydrophilic surface treatment
- Patent number 11,495,456
- Issue date Nov 8, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Ting Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for workpiece processing
- Patent number 11,482,434
- Issue date Oct 25, 2022
- BELTING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing of workpieces using deposition process and etch process
- Patent number 11,462,413
- Issue date Oct 4, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Shanyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing of workpieces with reactive species generated using alky...
- Patent number 11,387,111
- Issue date Jul 12, 2022
- Mattson Technology, Inc.
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon mandrel etch after native oxide punch-through
- Patent number 11,387,115
- Issue date Jul 12, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Chun Yan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS
- Publication number 20240425505
- Publication date Dec 26, 2024
- Bristol-Myers Squibb Company
- Guanglin Luo
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20240290664
- Publication date Aug 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- G01 - MEASURING TESTING
Information Patent Application
TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS
- Publication number 20240109888
- Publication date Apr 4, 2024
- Bristol-Myers Squibb Company
- Guanglin Luo
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240055242
- Publication date Feb 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SULFONE PYRIDINE ALKYL AMIDE-SUBSTITUTED HETEROARYL COMPOUNDS
- Publication number 20240002364
- Publication date Jan 4, 2024
- Bristol-Myers Squibb Company
- Chunjian Liu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
- Publication number 20230352294
- Publication date Nov 2, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control System For Adaptive Control Of A Thermal Processing System
- Publication number 20230273596
- Publication date Aug 31, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20230230887
- Publication date Jul 20, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Storek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMIDAZOPYRIDAZINE COMPOUNDS USEFUL AS MODULATORS OF IL-12, IL-23 AN...
- Publication number 20230183242
- Publication date Jun 15, 2023
- Bristol-Myers Squibb Company
- David R. Tortolani
- C07 - ORGANIC CHEMISTRY
Information Patent Application
AMIDE-DISUBSTITUTED PYRIDINE OR PYRIDAZINE COMPOUNDS
- Publication number 20230150979
- Publication date May 18, 2023
- Bristol-Myers Squibb Company
- Trevor C. Sherwood
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20230098442
- Publication date Mar 30, 2023
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
- Publication number 20230099054
- Publication date Mar 30, 2023
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Position for Workpieces and Replaceable Parts in a Vacuum...
- Publication number 20230091035
- Publication date Mar 23, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Martin L. Zucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Workpiece Processing
- Publication number 20230041905
- Publication date Feb 9, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EP2 ANTAGONIST
- Publication number 20220388955
- Publication date Dec 8, 2022
- ONO PHARMACEUTICAL CO., LTD.
- Akio WATANABE
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SUBSTITUTED BICYCLIC COMPOUNDS
- Publication number 20220331346
- Publication date Oct 20, 2022
- Bristol-Myers Squibb Company
- Alaric J. Dyckman
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Processing of Semiconductors Using Vaporized Solvents
- Publication number 20220223405
- Publication date Jul 14, 2022
- Beijing E-Town Semiconductor Technology, Co., LTD
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
- Publication number 20220195601
- Publication date Jun 23, 2022
- Mattson Technology, Inc.
- Michael Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
- Publication number 20220199376
- Publication date Jun 23, 2022
- Mattson Technology, Inc.
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20220189747
- Publication date Jun 16, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20220187021
- Publication date Jun 16, 2022
- Mattson Technology, Inc.
- Manuel Sohn
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
- Publication number 20220165561
- Publication date May 26, 2022
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS
- Publication number 20220119388
- Publication date Apr 21, 2022
- Bristol-Myers Squibb Company
- Guanglin Luo
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Thermal Processing of Closed Shape Workpieces
- Publication number 20220090221
- Publication date Mar 24, 2022
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
- Publication number 20220084839
- Publication date Mar 17, 2022
- Mattson Technology, Inc.
- Qi Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Generation of Hydrogen Reactive Species For Processing of Workpieces
- Publication number 20220059321
- Publication date Feb 24, 2022
- Mattson Technology, Inc.
- Qi Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
- Publication number 20210366727
- Publication date Nov 25, 2021
- Mattson Technology, Inc.
- Qi Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Sur...
- Publication number 20210343506
- Publication date Nov 4, 2021
- Mattson Technology, Inc.
- Ting Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
- Publication number 20210272858
- Publication date Sep 2, 2021
- Mattson Technology, Inc.
- Michael Storek
- G01 - MEASURING TESTING

Michael X. Yang

Person

Patents Grantslast 30 patents

Workpiece processing apparatus with thermal processing systems

Control system for adaptive control of a thermal processing system

Arc lamp with forming gas for thermal processing systems

Triazolopyridinyl compounds as kinase inhibitors

Support plate for localized heating in thermal processing systems

Apparatus for hydrogen assisted atmospheric radical oxidation

Transmission-based temperature measurement of a workpiece in a ther...

Systems and methods for workpiece processing

Workpiece processing apparatus with plasma and thermal processing s...

Thermal processing system with transmission switch plate

Sulfone pyridine alkyl amide-substituted heteroaryl compounds

Methods for the treatment of workpieces

Selective etch process using hydrofluoric acid and ozone gases

Triazolopyridinyl compounds as kinase inhibitors

Method for processing a workpiece using a multi-cycle thermal treat...

Arc lamp with forming gas for thermal processing systems

Substituted bicyclic compounds

Thermal processing system with temperature non-uniformity control

Control system for adaptive control of a thermal processing system

Transmission-based temperature measurement of a workpiece in a ther...

Heterocyclic compounds comprising pyridine useful as modulators of...

Methods and apparatus for post exposure bake processing of a workpiece

Hydrogen assisted atmospheric radical oxidation

Support plate for localized heating in thermal processing systems

Surface pretreatment process to improve quality of oxide films prod...

Ozone for selective hydrophilic surface treatment

Systems and methods for workpiece processing

Processing of workpieces using deposition process and etch process

Processing of workpieces with reactive species generated using alky...

Silicon mandrel etch after native oxide punch-through

Patents Applicationslast 30 patents

TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS

Support Plate for Localized Heating in Thermal Processing Systems

Transmission-Based Temperature Measurement of a Workpiece in a Ther...

TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS

Workpiece Processing Apparatus with Thermal Processing Systems

SULFONE PYRIDINE ALKYL AMIDE-SUBSTITUTED HETEROARYL COMPOUNDS

Arc Lamp With Forming Gas For Thermal Processing Systems

Control System For Adaptive Control Of A Thermal Processing System

Transmission-Based Temperature Measurement of a Workpiece in a Ther...

IMIDAZOPYRIDAZINE COMPOUNDS USEFUL AS MODULATORS OF IL-12, IL-23 AN...

AMIDE-DISUBSTITUTED PYRIDINE OR PYRIDAZINE COMPOUNDS

Support Plate for Localized Heating in Thermal Processing Systems

Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation

Transfer Position for Workpieces and Replaceable Parts in a Vacuum...

Systems and Methods for Workpiece Processing

EP2 ANTAGONIST

SUBSTITUTED BICYCLIC COMPOUNDS

Processing of Semiconductors Using Vaporized Solvents

Workpiece Processing Apparatus with Gas Showerhead Assembly

Workpiece Processing Apparatus with Vacuum Anneal Reflector Control

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

Workpiece Processing Apparatus with Thermal Processing Systems

Arc Lamp With Forming Gas For Thermal Processing Systems

TRIAZOLOPYRIDINYL COMPOUNDS AS KINASE INHIBITORS

Thermal Processing of Closed Shape Workpieces

Selective Etch Process Using Hydrofluoric Acid and Ozone Gases

Generation of Hydrogen Reactive Species For Processing of Workpieces

Processing of Workpieces Using Ozone Gas and Hydrogen Radicals

Methods And Apparatus For Pulsed Inductively Coupled Plasma For Sur...

Transmission-Based Temperature Measurement of a Workpiece in a Ther...