Michael Yen

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical planarization tool
- Patent number 12,172,263
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 11,679,469
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Michael Yen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Chemical Mechanical Planarization Tool
- Publication number 20230271298
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Michael Yen
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION TOOL
- Publication number 20210053180
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Michael Yen
- B24 - GRINDING POLISHING