Michael Zabka

Person

Eagan, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,901,205
- Issue date Feb 13, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,610,795
- Issue date Mar 21, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Environmental control material holder
- Patent number 11,581,209
- Issue date Feb 14, 2023
- Entegris, Inc.
- Jason T. Steffens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier
- Patent number 7,347,329
- Issue date Mar 25, 2008
- Entegris, Inc.
- John Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for cushioning wafer in wafer carrier
- Patent number 7,059,475
- Issue date Jun 13, 2006
- Entegris, Inc.
- Michael C. Zabka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective shipper
- Patent number 7,040,487
- Issue date May 9, 2006
- Entegris, Inc.
- Michael Zabka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport module with latching door
- Patent number 6,945,405
- Issue date Sep 20, 2005
- Entegris, Inc.
- Gregory Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
300MM single stackable film frame carrier
- Patent number 6,837,374
- Issue date Jan 4, 2005
- Entegris, Inc.
- James Nigg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container cushion system
- Patent number 6,644,477
- Issue date Nov 11, 2003
- Entegris, Inc.
- Gregory Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shock resistant variable load tolerant wafer shipper
- Patent number 6,550,619
- Issue date Apr 22, 2003
- Entergris, Inc.
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier having a low tolerance build-up
- Patent number 6,520,338
- Issue date Feb 18, 2003
- Entegris, Inc.
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cushioned wafer container
- Patent number 6,267,245
- Issue date Jul 31, 2001
- Fluoroware, Inc.
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier having a low tolerance build-up
- Patent number 6,216,874
- Issue date Apr 17, 2001
- Fluoroware, Inc.
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Disk container
- Patent number 6,070,730
- Issue date Jun 6, 2000
- Fluoroware, Inc.
- Motoyuki Narisawa
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230377925
- Publication date Nov 23, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRAL SEAL FOR CONTAINER
- Publication number 20230377923
- Publication date Nov 23, 2023
- Entegris, Inc.
- William J. Shaner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER
- Publication number 20230197490
- Publication date Jun 22, 2023
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS HAVING CONDUCTIVE POLYMER COATING FOR ELECTROST...
- Publication number 20230197491
- Publication date Jun 22, 2023
- Entegris, Inc.
- Zhifeng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER
- Publication number 20230131451
- Publication date Apr 27, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230128154
- Publication date Apr 27, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER
- Publication number 20220208582
- Publication date Jun 30, 2022
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENVIRONMENTAL CONTROL MATERIAL HOLDER
- Publication number 20210143040
- Publication date May 13, 2021
- Entegris, Inc.
- Jason T. STEFFENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER
- Publication number 20200075374
- Publication date Mar 5, 2020
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER
- Publication number 20170294327
- Publication date Oct 12, 2017
- Entegris, Inc.
- Barry GREGERSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Protective shipper
- Publication number 20060201847
- Publication date Sep 14, 2006
- Entegris, Inc.
- Michael Zabka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate carrier
- Publication number 20050109668
- Publication date May 26, 2005
- John Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER CUSHION SYSTEM
- Publication number 20030159971
- Publication date Aug 28, 2003
- Entegris, Inc.
- Gregory Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System for cushioning wafer in wafer carrier
- Publication number 20030066780
- Publication date Apr 10, 2003
- Entegris, Inc.
- Michael C. Zabka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
300MM single stackable film frame carrier
- Publication number 20030012628
- Publication date Jan 16, 2003
- Entegris, Inc.
- James Nigg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Protective shipper
- Publication number 20030010657
- Publication date Jan 16, 2003
- Michael Zabka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer carrier having a low tolerance build-up
- Publication number 20020125169
- Publication date Sep 12, 2002
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shock resistant variable load tolerant wafer shipper
- Publication number 20020014435
- Publication date Feb 7, 2002
- Gregory W. Bores
- H01 - BASIC ELECTRIC ELEMENTS

Michael Zabka

Person

Patents Grantslast 30 patents

Membrane diffuser for a substrate container

Membrane diffuser for a substrate container

Environmental control material holder

Substrate carrier

System for cushioning wafer in wafer carrier

Protective shipper

Transport module with latching door

300MM single stackable film frame carrier

Wafer container cushion system

Shock resistant variable load tolerant wafer shipper

Wafer carrier having a low tolerance build-up

Cushioned wafer container

Wafer carrier having a low tolerance build-up

Disk container

Patents Applicationslast 30 patents

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

INTEGRAL SEAL FOR CONTAINER

MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER

METHODS AND SYSTEMS HAVING CONDUCTIVE POLYMER COATING FOR ELECTROST...

METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER

ENVIRONMENTAL CONTROL MATERIAL HOLDER

MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER

SUBSTRATE CONTAINER

Protective shipper

Substrate carrier

WAFER CONTAINER CUSHION SYSTEM

System for cushioning wafer in wafer carrier

300MM single stackable film frame carrier

Protective shipper

Wafer carrier having a low tolerance build-up

Shock resistant variable load tolerant wafer shipper