Michaell Muecke

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Karben, DE

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Patents Grantslast 30 patents

Information Patent Grant
Magnetron sputtering cathode with magnet disposed between two yoke...
- Patent number 6,338,781
- Issue date Jan 15, 2002
- Singulus Technologies AG
- Eggo Sichmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...