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Michail Gallis
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Albuquerque, NM, US
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Patents Grants
last 30 patents
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Patent Grant
Methods and apparatus for use with extreme ultraviolet light having...
Patent number
9,389,180
Issue date
Jul 12, 2016
KLA-Tencor Corporation
Francis C. Chilese
G01 - MEASURING TESTING
Information
Patent Grant
Particle control near reticle and optics using showerhead
Patent number
9,244,368
Issue date
Jan 26, 2016
KLA-Tencor Corporation
Gildardo R. Delgado
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process and apparatus for separation of components of a gas stream
Patent number
8,753,439
Issue date
Jun 17, 2014
Sandia Corporation
Charles R. Bryan
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Process and apparatus for separation of components of a gas stream
Patent number
8,585,801
Issue date
Nov 19, 2013
Sandia Corporation
Charles R. Bryan
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Process and apparatus for separation of components of a gas stream
Patent number
8,535,424
Issue date
Sep 17, 2013
Sandia Corporation
Charles R. Bryan
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...
Publication number
20140231659
Publication date
Aug 21, 2014
Frank Chilese
G01 - MEASURING TESTING
Information
Patent Application
PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
Publication number
20140085618
Publication date
Mar 27, 2014
Gildardo R. Delgado
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY