Michal Emanuel PAWLOWSKI

Person

Norwalk, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Double-scanning opto-mechanical configurations to improve throughpu...
- Patent number 12,140,870
- Issue date Nov 12, 2024
- ASML Holding N.V.
- Michal Emanuel Pawlowski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contaminant detection metrology system, lithographic apparatus, and...
- Patent number 11,803,119
- Issue date Oct 31, 2023
- ASML Holding N.V.
- Michal Emanuel Pawlowski
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL...
- Publication number 20240272058
- Publication date Aug 15, 2024
- ASML NETHERLANDS B.V.
- Michal Emanuel PAWLOWSKI
- G01 - MEASURING TESTING
Information Patent Application
DOUBLE-SCANNING OPTO-MECHANICAL CONFIGURATIONS TO IMPROVE THROUGHPU...
- Publication number 20230350308
- Publication date Nov 2, 2023
- ASML Holding N.V.
- Michal Emanuel PAWLOWSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTAMINANT IDENTIFICATION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS...
- Publication number 20230142459
- Publication date May 11, 2023
- ASML Holding N.V.
- Andrew JUDGE
- G01 - MEASURING TESTING
Information Patent Application
CONTAMINANT ANALYZING METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND...
- Publication number 20230137537
- Publication date May 4, 2023
- ASML Holding N.V.
- Michal Emanuel PAWLOWSKI
- G01 - MEASURING TESTING
Information Patent Application
CONTAMINANT DETECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND...
- Publication number 20230106481
- Publication date Apr 6, 2023
- ASML Holding N.V.
- Michal Emanuel PAWLOWSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETEC...
- Publication number 20230055116
- Publication date Feb 23, 2023
- ASML Holding N.V.
- Peter Conrad KOCHERSPERGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michal Emanuel PAWLOWSKI

Person

Patents Grantslast 30 patents

Double-scanning opto-mechanical configurations to improve throughpu...

Contaminant detection metrology system, lithographic apparatus, and...

Patents Applicationslast 30 patents

INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL...

DOUBLE-SCANNING OPTO-MECHANICAL CONFIGURATIONS TO IMPROVE THROUGHPU...

CONTAMINANT IDENTIFICATION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS...

CONTAMINANT ANALYZING METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND...

CONTAMINANT DETECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND...

METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETEC...