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Michel Franciscus Johannes Van Rooy
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Bladel, NL
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Patents Grants
last 30 patents
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Patent Grant
Immersion lithography
Patent number
8,129,097
Issue date
Mar 6, 2012
ASML Netherlands B.V.
Dirk De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and substrate
Patent number
7,307,687
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Producing a Marker Pattern and Measurement of an Exposure-Related P...
Publication number
20100328636
Publication date
Dec 30, 2010
ASML NETHERLANDS B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion lithography
Publication number
20090170041
Publication date
Jul 2, 2009
ASML NETHERLANDS B.V.
Dirk De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and substrate
Publication number
20070216883
Publication date
Sep 20, 2007
ASML NETHERLANDS B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY