Michel Fransois Hubert Klaassen

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and a method for determining a polarization...
- Patent number 9,170,498
- Issue date Oct 27, 2015
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and alignment method
- Patent number 8,958,053
- Issue date Feb 17, 2015
- ASML Netherlands B.V.
- Michel François Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV radiation source and method of generating EUV radiation
- Patent number 8,730,454
- Issue date May 20, 2014
- ASML Netherlands B.V.
- Michel François Hubert Klaassen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment of collector device in lithographic apparatus
- Patent number 8,704,199
- Issue date Apr 22, 2014
- ASML Netherlands B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus and a Method for Determining a Polarization...
- Publication number 20130176547
- Publication date Jul 11, 2013
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHOD
- Publication number 20080030708
- Publication date Feb 7, 2008
- ASML NETHERLANDS B.V.
- Steven George Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and a method for determining a polarization...
- Publication number 20060203221
- Publication date Sep 14, 2006
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and methods for use thereof
- Publication number 20050206879
- Publication date Sep 22, 2005
- ASML NETHERLANDS B.V.
- Remco Marcel Van Dijk
- G01 - MEASURING TESTING