Michel Le Maire

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
System combination of a particle beam system and a light-optical sy...
- Patent number 11,087,955
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 10,777,958
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Michael Schall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective optical element for use in an EUV system
- Patent number 8,342,701
- Issue date Jan 1, 2013
- Carl Zeiss Laser Optics GmbH
- Holger Kierey
- G02 - OPTICS
Information Patent Grant
Optical system and method for shaping a profile of a laser beam
- Patent number 7,944,615
- Issue date May 17, 2011
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical devices and related systems and methods
- Patent number 7,629,572
- Issue date Dec 8, 2009
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SY...
- Publication number 20210035773
- Publication date Feb 4, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20180102620
- Publication date Apr 12, 2018
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
- Publication number 20110051267
- Publication date Mar 3, 2011
- CARL ZEISS LASER OPTICS GmbH
- Holger Kierey
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF ALASER BEAM
- Publication number 20090244712
- Publication date Oct 1, 2009
- CARL ZEISS LASER OPTICS GmbH
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical System and Method for Shaping a Profile of a Laser Beam
- Publication number 20090002833
- Publication date Jan 1, 2009
- Carl Zeiss SMT AG
- Vitaliy Shklover
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical devices and related systems and methods
- Publication number 20080272275
- Publication date Nov 6, 2008
- Vitaliy Shklover
- G02 - OPTICS