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Plasma etch equipment
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Patent number 5,587,039
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Issue date Dec 24, 1996
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Varian Associates, Inc.
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Siamak Salimian
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma etch process
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Patent number 5,376,223
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Issue date Dec 27, 1994
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Varian Associates, Inc.
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Siamak Salimian
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H01 - BASIC ELECTRIC ELEMENTS
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Laser treatment of silicon nitride
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Patent number 4,549,064
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Issue date Oct 22, 1985
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Fairchild Camera and Instrument Corp.
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Michelangelo Delfino
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H01 - BASIC ELECTRIC ELEMENTS
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