Michelle Schulberg

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Hydroxyl bond removal and film densification method for oxide films...
- Patent number 7,589,028
- Issue date Sep 15, 2009
- Novellus Systems, Inc.
- Seon-Mee Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of porogen removal from porous low-k films using UV radiation
- Patent number 7,208,389
- Issue date Apr 24, 2007
- Novellus Systems, Inc.
- Adrianne K. Tipton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma detemplating and silanol capping of porous dielectric films
- Patent number 7,176,144
- Issue date Feb 13, 2007
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for introduction of solid precursors and react...
- Patent number 6,951,765
- Issue date Oct 4, 2005
- Novellus Systems, Inc.
- Sanjay Gopinath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric films with low dielectric constants
- Patent number 6,576,345
- Issue date Jun 10, 2003
- Patrick A. Van Cleemput
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method to deposit SiOCH films with dielectric constant below 3.0
- Patent number 6,340,628
- Issue date Jan 22, 2002
- Novellus Systems, Inc.
- Patrick A. Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
System for deposition of mesoporous materials
- Publication number 20040096586
- Publication date May 20, 2004
- Michelle T. Schulberg
- H01 - BASIC ELECTRIC ELEMENTS