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Michiaki Kobayashi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum chamber
    • Patent number 8,532,818
    • Issue date Sep 10, 2013
    • Hitachi High-Technologies Corporation
    • Tomohiro Ohashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,048,259
    • Issue date Nov 1, 2011
    • Hitachi High-Technologies Corporation
    • Michiaki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20130183121
    • Publication date Jul 18, 2013
    • Hitachi High-Technologies Corporation
    • Ryoichi Isomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM CHAMBER
    • Publication number 20110137454
    • Publication date Jun 9, 2011
    • Tomohiro OHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20100186672
    • Publication date Jul 29, 2010
    • Koji Okuda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20100163185
    • Publication date Jul 1, 2010
    • Michiaki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARAUTS
    • Publication number 20090078372
    • Publication date Mar 26, 2009
    • Takeo Uchino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus capable of adjusting pressure within pr...
    • Publication number 20080066859
    • Publication date Mar 20, 2008
    • Michiaki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20070068626
    • Publication date Mar 29, 2007
    • Michiaki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20070068628
    • Publication date Mar 29, 2007
    • Takeo Uchino
    • H01 - BASIC ELECTRIC ELEMENTS