Michiaki Kobayashi

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion shield plate base for semiconductor manufacturing apparatus
- Patent number D924824
- Issue date Jul 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yutaka Kouzuma
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Integrated type ion shield for semiconductor manufacturing apparatus
- Patent number D901407
- Issue date Nov 10, 2020
- HITACHI HIGH-TECH CORPORATION
- Yutaka Kouzuma
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ion shield plate for semiconductor manufacturing apparatus
- Patent number D900760
- Issue date Nov 3, 2020
- HITACHI HIGH-TECH CORPORATION
- Yutaka Kouzuma
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Infrared lamp heater transmission window for semiconductor manufact...
- Patent number D864885
- Issue date Oct 29, 2019
- Hitachi High-Technologies Corporation
- Michiaki Kobayashi
- D13 - Equipment for production, distribution, or transformation of energy