Michiaki MATSUDA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning device, polishing device, and device and method for calcul...
- Patent number 11,664,252
- Issue date May 30, 2023
- Ebara Corporation
- Michiaki Matsuda
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS AND POLISHING END POINT DETECTION METHOD IN POL...
- Publication number 20240342854
- Publication date Oct 17, 2024
- EBARA CORPORATION
- Hiroki NAKAMURA
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING DEVICE, POLISHING DEVICE, AND DEVICE AND METHOD FOR CALCUL...
- Publication number 20220406633
- Publication date Dec 22, 2022
- EBARA CORPORATION
- Michiaki MATSUDA
- B08 - CLEANING