Michiaki MATSUSHITA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 12,077,392
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hitoshi Hashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate storage apparatus, substrate storage method, and recordin...
- Patent number 11,699,608
- Issue date Jul 11, 2023
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, method and non-transitory storage medium for accommodati...
- Patent number 10,424,499
- Issue date Sep 24, 2019
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, method and non-transitory storage medium for accommodati...
- Patent number 9,627,237
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for supporting a substrate
- Patent number 8,528,889
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Seiji Nakano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system
- Patent number 8,206,076
- Issue date Jun 26, 2012
- Tokyo Electron Limited
- Issei Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate dual-side processing apparatus
- Patent number 6,874,515
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Coating and developing apparatus and pattern forming method
- Patent number 6,814,809
- Issue date Nov 9, 2004
- Tokyo Electron Limited
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,319,322
- Issue date Nov 20, 2001
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double-sided substrate cleaning apparatus and cleaning method using...
- Patent number 5,964,954
- Issue date Oct 12, 1999
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING
Information Patent Grant
Resist treating method
- Patent number 5,686,143
- Issue date Nov 11, 1997
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING
Information Patent Grant
Double-sided substrate cleaning apparatus
- Patent number 5,518,542
- Issue date May 21, 1996
- Tokyo Electron Limited
- Hiroyuki Matsukawa
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrates
- Patent number 5,498,294
- Issue date Mar 12, 1996
- Tokyo Electron Limited
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin chuck and treatment apparatus using same
- Patent number 5,421,056
- Issue date Jun 6, 1995
- Tokyo Electron Limited
- Kiyohisa Tateyama
- B08 - CLEANING
Information Patent Grant
Device having brush for scrubbing substrate
- Patent number 5,375,291
- Issue date Dec 27, 1994
- Tokyo Electron Limited
- Kiyohisa Tateyama
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20210347584
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE STORAGE APPARATUS, SUBSTRATE STORAGE METHOD, AND RECORDIN...
- Publication number 20200058531
- Publication date Feb 20, 2020
- TOKYO ELECTRON LIMITED
- Akihiro MATSUMOTO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMODATIN...
- Publication number 20170178941
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Akihiro MATSUMOTO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMMODATI...
- Publication number 20140199140
- Publication date Jul 17, 2014
- TOKYO ELECTRON LIMITED
- Akihiro MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE
- Publication number 20100243168
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20090003825
- Publication date Jan 1, 2009
- TOKYO ELECTRON LIMITED
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus and pattern forming method
- Publication number 20050042555
- Publication date Feb 24, 2005
- TOKYO ELECTRON LIMITED
- Michiaki Matsushita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate dual-side processing apparatus
- Publication number 20020157692
- Publication date Oct 31, 2002
- Akira Ishihara
- G02 - OPTICS
Information Patent Application
Coating and developing apparatus and pattern forming method
- Publication number 20020076658
- Publication date Jun 20, 2002
- TOKYO ELECTRON LIMITED
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20010055522
- Publication date Dec 27, 2001
- TOKYO ELECTRON LIMITED
- Masatoshi Kaneda
- H01 - BASIC ELECTRIC ELEMENTS

Michiaki MATSUSHITA

Person

Patents Grantslast 30 patents

Substrate transfer apparatus and substrate transfer method

Substrate storage apparatus, substrate storage method, and recordin...

Apparatus, method and non-transitory storage medium for accommodati...

Apparatus, method and non-transitory storage medium for accommodati...

Device and method for supporting a substrate

Substrate processing system

Substrate dual-side processing apparatus

Coating and developing apparatus and pattern forming method

Substrate processing apparatus

Double-sided substrate cleaning apparatus and cleaning method using...

Resist treating method

Double-sided substrate cleaning apparatus

Apparatus and method for washing substrates

Spin chuck and treatment apparatus using same

Device having brush for scrubbing substrate

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE STORAGE APPARATUS, SUBSTRATE STORAGE METHOD, AND RECORDIN...

APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMODATIN...

APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMMODATI...

DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE

SUBSTRATE PROCESSING SYSTEM

Coating and developing apparatus and pattern forming method

Substrate dual-side processing apparatus

Coating and developing apparatus and pattern forming method

Substrate processing apparatus