Michiel KUPERS

Person

Roermond, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for optimization of lithographic process
- Patent number 12,044,981
- Issue date Jul 23, 2024
- ASML Netherlands B.V.
- Marc Hauptmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,782,349
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of obtaining measurements, apparatus for performing a proces...
- Patent number 11,774,862
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G01 - MEASURING TESTING
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,592,753
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,327,407
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of obtaining measurements, apparatus for performing a proces...
- Patent number 11,175,591
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for optimization of lithographic process
- Patent number 11,099,487
- Issue date Aug 24, 2021
- ASML Netherlands B.V.
- Marc Hauptmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of controlling a patterning process, device manufacturing m...
- Patent number 10,908,512
- Issue date Feb 2, 2021
- ASML Netherlands B.V.
- Daan Maurits Slotboom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process
- Patent number 10,877,381
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of sequencing lots for a lithographic apparatus
- Patent number 10,281,825
- Issue date May 7, 2019
- ASML Netherlands B.V.
- Michiel Kupers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20230168591
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20220229373
- Publication date Jul 21, 2022
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...
- Publication number 20220035259
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
- Publication number 20210349402
- Publication date Nov 11, 2021
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20210080836
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
- Publication number 20200050180
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS
- Publication number 20200026201
- Publication date Jan 23, 2020
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
- Publication number 20200019067
- Publication date Jan 16, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...
- Publication number 20190137892
- Publication date May 9, 2019
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF SEQUENCING LOTS FOR A LITHOGRAPHIC APPARATUS
- Publication number 20190072857
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Michiel KUPERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF CONTROLLING A PATTERNING PROCESS, DEVICE MANUFACTURING M...
- Publication number 20180373162
- Publication date Dec 27, 2018
- Daan Maurits SLOTBOOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michiel KUPERS

Person

Patents Grantslast 30 patents

Method and apparatus for optimization of lithographic process

Methods of determining corrections for a patterning process, device...

Method of obtaining measurements, apparatus for performing a proces...

Methods of determining corrections for a patterning process, device...

Methods of determining corrections for a patterning process, device...

Method of obtaining measurements, apparatus for performing a proces...

Method and apparatus for optimization of lithographic process

Methods of controlling a patterning process, device manufacturing m...

Methods of determining corrections for a patterning process

Method of sequencing lots for a lithographic apparatus

Patents Applicationslast 30 patents

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...

METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS

METHOD AND APPARATUS FOR OPTIMIZATION OF LITHOGRAPHIC PROCESS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS

METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCES...

METHOD OF SEQUENCING LOTS FOR A LITHOGRAPHIC APPARATUS

METHODS OF CONTROLLING A PATTERNING PROCESS, DEVICE MANUFACTURING M...