Michihiko TOMITA

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Nagasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning apparatus for semiconductor wafer and method of cleaning s...
- Patent number 12,205,830
- Issue date Jan 21, 2025
- Sumco Corporation
- Kaito Noda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER CLEANING DEVICE, SEMICONDUCTOR WAFER CLEANING M...
- Publication number 20240258126
- Publication date Aug 1, 2024
- SUMCO CORPORATION
- Kaito NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR SEMICONDUCTOR WAFER AND METHOD OF CLEANING S...
- Publication number 20230033913
- Publication date Feb 2, 2023
- SUMCO CORPORATION
- Kaito NODA
- H01 - BASIC ELECTRIC ELEMENTS