Michihiro KAWAGUCHI

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 11,049,688
- Issue date Jun 29, 2021
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vibration control system and optical equipment equipped therewith
- Patent number 10,607,810
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive contact point pin and charged particle beam apparatus
- Patent number 10,373,793
- Issue date Aug 6, 2019
- NUFLARE TECHNOLOGY, INC.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cover
- Patent number 10,129,985
- Issue date Nov 13, 2018
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mask cover, charged particle beam drawing apparatus and charged par...
- Patent number 9,299,531
- Issue date Mar 29, 2016
- NUFLARE TECHNOLOGY, INC.
- Yu Asami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
- Patent number 8,987,683
- Issue date Mar 24, 2015
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,912,513
- Issue date Dec 16, 2014
- NuFlare Technology, Inc.
- Kentaro Omi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,847,178
- Issue date Sep 30, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cover and charged particle beam writing method using same
- Patent number 8,779,397
- Issue date Jul 15, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting substrate position of charged particle beam ph...
- Patent number 8,237,139
- Issue date Aug 7, 2012
- Nuflare Technology, Inc.
- Kota Fujiwara
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
VACUUM APPARATUS
- Publication number 20220172922
- Publication date Jun 2, 2022
- NuFlare Technology, Inc.
- Yoshiaki SHINOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS
- Publication number 20200105499
- Publication date Apr 2, 2020
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH
- Publication number 20190214224
- Publication date Jul 11, 2019
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conductive Contact Point Pin and Charged Particle Beam Apparatus
- Publication number 20180068824
- Publication date Mar 8, 2018
- NUFLARE TECHNOLOGY, INC.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COVER
- Publication number 20160105945
- Publication date Apr 14, 2016
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MASK COVER, CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PAR...
- Publication number 20140319372
- Publication date Oct 30, 2014
- NUFLARE TECHNOLOGY, INC.
- Yu ASAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20140319373
- Publication date Oct 30, 2014
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Writing Apparatus and Charged Particle Beam W...
- Publication number 20130250282
- Publication date Sep 26, 2013
- NuFlare Technology, Inc.
- Kentaro Omi
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130082193
- Publication date Apr 4, 2013
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE COVER AND CHARGED PARTICLE BEAM WRITING METHOD USING SAME
- Publication number 20110155930
- Publication date Jun 30, 2011
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR DETECTING SUBSTRATE POSITION OF CHARGED PARTICLE BEAM PH...
- Publication number 20100290023
- Publication date Nov 18, 2010
- NuFlare Technology, Inc.
- Kota FUJIWARA
- B82 - NANO-TECHNOLOGY

Michihiro KAWAGUCHI

Person

Patents Grantslast 30 patents

Vacuum apparatus

Charged particle beam irradiation apparatus

Vibration control system and optical equipment equipped therewith

Conductive contact point pin and charged particle beam apparatus

Substrate cover

Mask cover, charged particle beam drawing apparatus and charged par...

Charged particle beam drawing apparatus and charged particle beam d...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus and charged particle beam w...

Substrate cover and charged particle beam writing method using same

Method for detecting substrate position of charged particle beam ph...

Patents Applicationslast 30 patents

VACUUM APPARATUS

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

VIBRATION CONTROL SYSTEM AND OPTICAL EQUIPMENT EQUIPPED THEREWITH

Conductive Contact Point Pin and Charged Particle Beam Apparatus

SUBSTRATE COVER

MASK COVER, CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PAR...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...

Charged Particle Beam Writing Apparatus and Charged Particle Beam W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

SUBSTRATE COVER AND CHARGED PARTICLE BEAM WRITING METHOD USING SAME

METHOD FOR DETECTING SUBSTRATE POSITION OF CHARGED PARTICLE BEAM PH...