Michihiro Ono

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and manufacturing appa...
- Patent number 6,838,370
- Issue date Jan 4, 2005
- Tokyo Electron Limited
- Takayuki Niuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a plated layer to a predetermined thickness
- Patent number 6,607,650
- Issue date Aug 19, 2003
- Tokyo Electron Ltd.
- Takayuki Niuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device, cleaning system, treating device and cleaning method
- Patent number 6,478,035
- Issue date Nov 12, 2002
- Tokyo Electron Limited
- Takayuki Niuya
- B08 - CLEANING