Michihiro SAKAI

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Settling time acquisition method
- Patent number 8,872,139
- Issue date Oct 28, 2014
- NuFlare Technology, Inc.
- Rieko Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and optical axis deviation...
- Patent number 8,076,649
- Issue date Dec 13, 2011
- Nuflare Technology, Inc.
- Michihiro Sakai
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SETTLING TIME ACQUISITION METHOD
- Publication number 20140284500
- Publication date Sep 25, 2014
- NuFlure Technology, Inc.
- Rieko NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND OPTICAL AXIS DEVIATION...
- Publication number 20100224789
- Publication date Sep 9, 2010
- NuFlare Technology, Inc.
- Michihiro Sakai
- B82 - NANO-TECHNOLOGY