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Michihiro Takata
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Toyama, JP
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last 30 patents
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Patent Grant
Apparatus and method of chamfering wafer
Patent number
6,439,969
Issue date
Aug 27, 2002
Nippei Toyama Corporation
Kikuo Koma
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for grinding a workpiece
Patent number
6,332,834
Issue date
Dec 25, 2001
Nippei Toyama Corporation
Mitsuru Nukui
B24 - GRINDING POLISHING