Michihisa Takachi

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Hwaseong-City, KR

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Patents Grantslast 30 patents

Information Patent Grant
Resist mask processing method using hydrogen containing plasma
- Patent number 9,337,020
- Issue date May 10, 2016
- Tokyo Electron Limited
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RESIST MASK PROCESSING METHOD
- Publication number 20150104957
- Publication date Apr 16, 2015
- TOKYO ELECTRON LIMITED
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS