Michiko Nishiwaki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and semiconductor device manufacturi...
- Patent number 6,541,344
- Issue date Apr 1, 2003
- Hitachi Kokusai Electric Inc.
- Katsuhisa Kasanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and semiconductor device producing m...
- Patent number 6,483,989
- Issue date Nov 19, 2002
- Hitachi Kokusai Electric Inc.
- Satoshi Okada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060075972
- Publication date Apr 13, 2006
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and semiconductor device producing m...
- Publication number 20020160560
- Publication date Oct 31, 2002
- Satoshi Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and semiconductor device manufacturi...
- Publication number 20020072165
- Publication date Jun 13, 2002
- Hitachi Kokusai Electric Inc.
- Katsuhisa Kasanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020017363
- Publication date Feb 14, 2002
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...