Michinori Kawaguchi

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Shunan-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Operation method for vacuum processing apparatus
- Patent number 9,257,318
- Issue date Feb 9, 2016
- Hitachi High-Technologies Corporation
- Michinori Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process device and vacuum process method
- Patent number 8,812,151
- Issue date Aug 19, 2014
- Hitachi High-Technologies Corporation
- Teruo Nakata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vacuum processing device and method of transporting process subject...
- Patent number 8,588,962
- Issue date Nov 19, 2013
- Hitachi High-Technologies Corporation
- Keita Nogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing method and vacuum processing apparatus
- Patent number 7,353,076
- Issue date Apr 1, 2008
- Hitachi High-Technologies Corporation
- Nobuo Nagayasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPERATION METHOD FOR VACUUM PROCESSING APPARATUS
- Publication number 20140294555
- Publication date Oct 2, 2014
- Hitachi High-Technologies Corporation
- Michinori KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
- Publication number 20140099176
- Publication date Apr 10, 2014
- Hitachi High-Technologies Corporation
- Keita NOGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING DEVICE AND METHOD OF TRANSPORTING PROCESS SUBJECT...
- Publication number 20130108400
- Publication date May 2, 2013
- Hitachi High-Technologies Corporation
- Keita NOGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESS DEVICE AND VACUUM PROCESS METHOD
- Publication number 20120303158
- Publication date Nov 29, 2012
- Teruo NAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing method and vacuum processing apparatus
- Publication number 20070100488
- Publication date May 3, 2007
- Nobuo Nagayasu
- H01 - BASIC ELECTRIC ELEMENTS