Michio HATANO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device, autofocus processing method of charge...
- Patent number 11,538,659
- Issue date Dec 27, 2022
- HITACHI HIGH-TECH CORPORATION
- Mitsuhiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,758
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Anoru Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image forming apparatus
- Patent number 10,755,396
- Issue date Aug 25, 2020
- Hitachi, Ltd.
- Momoyo Enyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement device, calibration method of measurement device, and c...
- Patent number 10,438,771
- Issue date Oct 8, 2019
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and electron trajectory adjustment met...
- Patent number 10,262,830
- Issue date Apr 16, 2019
- Hitachi, Ltd.
- Daisuke Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measuring apparatus, pattern measuring method, and computer...
- Patent number 9,521,372
- Issue date Dec 13, 2016
- Hitachi High-Technologies Corporation
- Yoshinori Momonoi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Scanning electron microscope
- Patent number 9,472,376
- Issue date Oct 18, 2016
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and image forming method
- Patent number 9,245,711
- Issue date Jan 26, 2016
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus for visualizing a displacement of an electr...
- Patent number 9,208,994
- Issue date Dec 8, 2015
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device with bandpass detection
- Patent number 9,202,667
- Issue date Dec 1, 2015
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,029,766
- Issue date May 12, 2015
- Hitachi High-Technologies Corporation
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,629,395
- Issue date Jan 14, 2014
- Hitachi High-Technologies Corporation
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,217,363
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Michio Hatano
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,097,848
- Issue date Jan 17, 2012
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,755,045
- Issue date Jul 13, 2010
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,511,271
- Issue date Mar 31, 2009
- Hitachi Science Systems, Ltd.
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 7,504,624
- Issue date Mar 17, 2009
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Sample Holder and Electron Microscope
- Publication number 20240162000
- Publication date May 16, 2024
- Hitachi High-Tech Corporation
- Yuji ASAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20240128049
- Publication date Apr 18, 2024
- HITACHI HIGH-TECH CORPORATION
- Katsura TAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin Film Damage Detection Function and Charged Particle Beam Device
- Publication number 20240085352
- Publication date Mar 14, 2024
- Hitachi High-Tech Corporation
- Michio HATANO
- G01 - MEASURING TESTING
Information Patent Application
Sample Holder, Intermembrane Distance Adjustment Mechanism, and Cha...
- Publication number 20240079201
- Publication date Mar 7, 2024
- Hitachi High-Tech Corporation
- Michio HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, Autofocus Processing Method of Charge...
- Publication number 20220044906
- Publication date Feb 10, 2022
- Hitachi High-Tech Corporation
- Mitsuhiro NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210391143
- Publication date Dec 16, 2021
- Hitachi High-Tech Corporation
- Anoru SUGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210272768
- Publication date Sep 2, 2021
- Hitachi High-Tech Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYZING SYSTEM
- Publication number 20200225175
- Publication date Jul 16, 2020
- Hitachi, Ltd
- Akiko KAGATSUME
- G01 - MEASURING TESTING
Information Patent Application
IMAGE FORMING APPARATUS
- Publication number 20180232869
- Publication date Aug 16, 2018
- Hitachi, Ltd
- Momoyo ENYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND ELECTRON TRAJECTORY ADJUSTMENT MET...
- Publication number 20170263415
- Publication date Sep 14, 2017
- Hitachi, Ltd
- Daisuke BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...
- Publication number 20170092462
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Michio HATANO
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Apparatus and Image Forming Method
- Publication number 20150221471
- Publication date Aug 6, 2015
- Hitachi High-Technologies Corporation
- Michio HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20150008322
- Publication date Jan 8, 2015
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- G01 - MEASURING TESTING
Information Patent Application
PATTERN MEASURING APPARATUS, PATTERN MEASURING METHOD, AND COMPUTER...
- Publication number 20130321610
- Publication date Dec 5, 2013
- Yoshinori Momonoi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Apparatus
- Publication number 20130146766
- Publication date Jun 13, 2013
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE
- Publication number 20130043388
- Publication date Feb 21, 2013
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20120298864
- Publication date Nov 29, 2012
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20100090109
- Publication date Apr 15, 2010
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090230304
- Publication date Sep 17, 2009
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPLICATION APPARATUS
- Publication number 20090101817
- Publication date Apr 23, 2009
- Takashi OHSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20080237465
- Publication date Oct 2, 2008
- Hitachi High-Technologies Corporation
- Michio Hatano
- G01 - MEASURING TESTING
Information Patent Application
Scanning Electron Microscope
- Publication number 20080035843
- Publication date Feb 14, 2008
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device
- Publication number 20060255269
- Publication date Nov 16, 2006
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20060186337
- Publication date Aug 24, 2006
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS

Michio HATANO

Person

Patents Grantslast 30 patents

Charged particle beam device, autofocus processing method of charge...

Charged particle beam device

Charged particle beam device

Image forming apparatus

Measurement device, calibration method of measurement device, and c...

Scanning electron microscope and electron trajectory adjustment met...

Pattern measuring apparatus, pattern measuring method, and computer...

Scanning electron microscope

Charged particle beam apparatus and image forming method

Electron beam apparatus for visualizing a displacement of an electr...

Charged particle radiation device with bandpass detection

Scanning electron microscope

Charged particle beam apparatus

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope

Charged particle beam device

Patents Applicationslast 30 patents

Sample Holder and Electron Microscope

ELECTRON MICROSCOPE

Thin Film Damage Detection Function and Charged Particle Beam Device

Sample Holder, Intermembrane Distance Adjustment Mechanism, and Cha...

Charged Particle Beam Device, Autofocus Processing Method of Charge...

Charged Particle Beam Device

Charged Particle Beam Device

ANALYZING SYSTEM

IMAGE FORMING APPARATUS

SCANNING ELECTRON MICROSCOPE AND ELECTRON TRAJECTORY ADJUSTMENT MET...

MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...

Charged Particle Beam Apparatus and Image Forming Method

SCANNING ELECTRON MICROSCOPE

PATTERN MEASURING APPARATUS, PATTERN MEASURING METHOD, AND COMPUTER...

Electron Beam Apparatus

CHARGED PARTICLE RADIATION DEVICE

Charged Particle Beam Apparatus

SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE APPLICATION APPARATUS

Scanning electron microscope

Scanning Electron Microscope

Charged particle beam device

Scanning electron microscope