Michio Ishikawa

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Shizuoka-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and etching apparatus
- Patent number 8,125,069
- Issue date Feb 28, 2012
- Philtech Inc.
- Toshio Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, DRY-ETC...
- Publication number 20100270654
- Publication date Oct 28, 2010
- Toshio HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE-COUPLED MAGNETIC NEUTRAL LOOP PLASMA SPUTTERING SYSTEM
- Publication number 20090314636
- Publication date Dec 24, 2009
- Michio Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device and method for manufacturing the same, dry-etc...
- Publication number 20090102025
- Publication date Apr 23, 2009
- Toshio Hayashi
- H01 - BASIC ELECTRIC ELEMENTS