Michio Kohno

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical system and exposure apparatus having the same
- Patent number 7,292,316
- Issue date Nov 6, 2007
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and method, and exposure apparatus
- Patent number 7,079,220
- Issue date Jul 18, 2006
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and method, and exposure apparatus
- Patent number 6,999,157
- Issue date Feb 14, 2006
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and exposure apparatus having the same
- Patent number 6,857,764
- Issue date Feb 22, 2005
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, projection exposure apparatus, and device f...
- Patent number 6,833,905
- Issue date Dec 21, 2004
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and device manufacturing method using the same
- Patent number 6,621,061
- Issue date Sep 16, 2003
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus that illuminates a mark and causes light from th...
- Patent number 6,603,530
- Issue date Aug 5, 2003
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspecting a surface state
- Patent number 5,963,316
- Issue date Oct 5, 1999
- Canon Kabushiki Kaisha
- Seiya Miura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus, and exposure apparatus and device manufacturi...
- Patent number 5,774,575
- Issue date Jun 30, 1998
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection system for original with pellicle
- Patent number 5,652,657
- Issue date Jul 29, 1997
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Grant
Surface-condition inspection method and apparatus including a plura...
- Patent number 5,602,639
- Issue date Feb 11, 1997
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface state inspecting system including a scanning optical system...
- Patent number 5,591,985
- Issue date Jan 7, 1997
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting device
- Patent number 5,585,916
- Issue date Dec 17, 1996
- Canon Kabushiki Kaisha
- Seiya Miura
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting a reticle for color centers
- Patent number 5,581,089
- Issue date Dec 3, 1996
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting device using bisected multi-mode laser beam and...
- Patent number 5,581,348
- Issue date Dec 3, 1996
- Canon Kabushiki Kaisha
- Seiya Miura
- G01 - MEASURING TESTING
Information Patent Grant
Surface-condition inspection apparatus
- Patent number 5,528,360
- Issue date Jun 18, 1996
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface state inspection apparatus and exposure apparatus including...
- Patent number 5,448,350
- Issue date Sep 5, 1995
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Foreign particle inspection apparatus
- Patent number 5,399,867
- Issue date Mar 21, 1995
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface-condition inspection apparatus
- Patent number 5,381,225
- Issue date Jan 10, 1995
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Optical scanning apparatus, surface-state inspection apparatus and...
- Patent number 5,359,407
- Issue date Oct 25, 1994
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Grant
Surface condition inspection method and apparatus using image transfer
- Patent number 5,162,867
- Issue date Nov 10, 1992
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting apparatus having a detection sensitivity controller means
- Patent number 5,105,092
- Issue date Apr 14, 1992
- Canon Kabushiki Kaisha
- Katsutoshi Natsubori
- G01 - MEASURING TESTING
Information Patent Grant
Surface examining apparatus for detecting the presence of foreign p...
- Patent number 5,017,798
- Issue date May 21, 1991
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Surface state inspecting device for inspecting the state of paralle...
- Patent number 4,999,511
- Issue date Mar 12, 1991
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface examining apparatus for detecting the presence of foreign p...
- Patent number 4,886,975
- Issue date Dec 12, 1989
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for observing patterned article
- Patent number 4,871,257
- Issue date Oct 3, 1989
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical device having a variable geometry filter usable for alignin...
- Patent number 4,865,455
- Issue date Sep 12, 1989
- Canon Kabushiki Kaisha
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical device capable of maintaining pupil imaging
- Patent number 4,830,499
- Issue date May 16, 1989
- Canon Kabushiki Kaisha
- Michio Kohno
- G02 - OPTICS
Information Patent Grant
Surface inspecting device for detecting the position of foreign mat...
- Patent number 4,831,274
- Issue date May 16, 1989
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Surface examining apparatus for detecting the presence of foreign p...
- Patent number 4,795,911
- Issue date Jan 3, 1989
- Canon Kabushiki Kaisha
- Michio Kohno
- G01 - MEASURING TESTING

Michio Kohno

Person

Patents Grantslast 30 patents

Illumination optical system and exposure apparatus having the same

Illumination optical system and method, and exposure apparatus

Illumination optical system and method, and exposure apparatus

Illumination optical system and exposure apparatus having the same

Illumination apparatus, projection exposure apparatus, and device f...

Exposure method and device manufacturing method using the same

Exposure apparatus that illuminates a mark and causes light from th...

Method and apparatus for inspecting a surface state

Inspection apparatus, and exposure apparatus and device manufacturi...

Inspection system for original with pellicle

Surface-condition inspection method and apparatus including a plura...

Surface state inspecting system including a scanning optical system...

Surface inspecting device

Apparatus and method for inspecting a reticle for color centers

Surface inspecting device using bisected multi-mode laser beam and...

Surface-condition inspection apparatus

Surface state inspection apparatus and exposure apparatus including...

Foreign particle inspection apparatus

Surface-condition inspection apparatus

Optical scanning apparatus, surface-state inspection apparatus and...

Surface condition inspection method and apparatus using image transfer

Inspecting apparatus having a detection sensitivity controller means

Surface examining apparatus for detecting the presence of foreign p...

Surface state inspecting device for inspecting the state of paralle...

Surface examining apparatus for detecting the presence of foreign p...

Optical apparatus for observing patterned article

Optical device having a variable geometry filter usable for alignin...

Optical device capable of maintaining pupil imaging

Surface inspecting device for detecting the position of foreign mat...

Surface examining apparatus for detecting the presence of foreign p...