Michio Kohno

Person

Utsunomiya-shi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
Illumination optical system and method, and exposure apparatus
- Publication number 20050280796
- Publication date Dec 22, 2005
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050179881
- Publication date Aug 18, 2005
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system and exposure apparatus having the same
- Publication number 20050099814
- Publication date May 12, 2005
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040218164
- Publication date Nov 4, 2004
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ilumination optical system and method, and exposure apparatus
- Publication number 20030197838
- Publication date Oct 23, 2003
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination apparatus, projection exposure apparatus, and device f...
- Publication number 20030035091
- Publication date Feb 20, 2003
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME
- Publication number 20020039291
- Publication date Apr 4, 2002
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and device manufacturing method using the same
- Publication number 20020005495
- Publication date Jan 17, 2002
- Michio Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michio Kohno

Person

Patents Applicationslast 30 patents

Illumination optical system and method, and exposure apparatus

Exposure apparatus and method

Illumination optical system and exposure apparatus having the same

Exposure apparatus

Ilumination optical system and method, and exposure apparatus

Illumination apparatus, projection exposure apparatus, and device f...

ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME

Exposure method and device manufacturing method using the same