Michio Kono

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imaging optical system, exposure apparatus, and article manufacturi...
- Patent number 11,966,043
- Issue date Apr 23, 2024
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and article manufa...
- Patent number 11,448,969
- Issue date Sep 20, 2022
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and article manufacturing method
- Patent number 11,215,930
- Issue date Jan 4, 2022
- Canon Kabushiki Kaisha
- Michio Kono
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, and article manufacturing method
- Patent number 11,187,988
- Issue date Nov 30, 2021
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 11,099,488
- Issue date Aug 24, 2021
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 10,921,717
- Issue date Feb 16, 2021
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus, and article manufact...
- Patent number 10,578,846
- Issue date Mar 3, 2020
- Canon Kabushiki Kaisha
- Michio Kono
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and article manufact...
- Patent number 10,067,325
- Issue date Sep 4, 2018
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 8,294,874
- Issue date Oct 23, 2012
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and device fabrica...
- Patent number 8,174,679
- Issue date May 8, 2012
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, setting method, and exposure method having the...
- Patent number 7,864,296
- Issue date Jan 4, 2011
- Canon Kabushiki Kaisha
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...
- Publication number 20220390853
- Publication date Dec 8, 2022
- Canon Kabushiki Kaisha
- Michio Kono
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20220011571
- Publication date Jan 13, 2022
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20200301287
- Publication date Sep 24, 2020
- Canon Kabushiki Kaisha
- Michio Kono
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200249582
- Publication date Aug 6, 2020
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200249583
- Publication date Aug 6, 2020
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...
- Publication number 20200249580
- Publication date Aug 6, 2020
- Canon Kabushiki Kaisha
- Michio Kono
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFAC...
- Publication number 20180341093
- Publication date Nov 29, 2018
- Canon Kabushiki Kaisha
- Michio KONO
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFACT...
- Publication number 20180106989
- Publication date Apr 19, 2018
- Canon Kabushiki Kaisha
- Michio KONO
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICA...
- Publication number 20090219498
- Publication date Sep 3, 2009
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20090213348
- Publication date Aug 27, 2009
- Canon Kabushiki Kaisha
- Michio Kono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD
- Publication number 20070046921
- Publication date Mar 1, 2007
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michio Kono

Person

Patents Grantslast 30 patents

Imaging optical system, exposure apparatus, and article manufacturi...

Illumination optical system, exposure apparatus, and article manufa...

Exposure apparatus, and article manufacturing method

Exposure apparatus, and article manufacturing method

Exposure apparatus and article manufacturing method

Exposure apparatus and article manufacturing method

Projection optical system, exposure apparatus, and article manufact...

Projection optical system, exposure apparatus, and article manufact...

Exposure apparatus

Illumination optical system, exposure apparatus, and device fabrica...

Exposure apparatus, setting method, and exposure method having the...

Patents Applicationslast 30 patents

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...

IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURI...

EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFAC...

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFACT...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICA...

EXPOSURE APPARATUS

EXPOSURE APPARATUS AND METHOD