TREA

Michio Murata

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate inspection apparatus
    • Patent number 10,962,565
    • Issue date Mar 30, 2021
    • Tokyo Electron Limited
    • Michio Murata
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Substrate inspection apparatus
    • Patent number 10,114,070
    • Issue date Oct 30, 2018
    • Tokyo Electron Limited
    • Michio Murata
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Substrate inspection apparatus
    • Patent number 9,678,107
    • Issue date Jun 13, 2017
    • Tokyo Electron Limited
    • Shingo Morita
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE INSPECTION APPARATUS
    • Publication number 20190107557
    • Publication date Apr 11, 2019
    • Tokyo Electron Limited
    • Michio MURATA
    • G01 - MEASURING TESTING
  • Information Patent Application

    SUBSTRATE INSPECTION APPARATUS
    • Publication number 20150276810
    • Publication date Oct 1, 2015
    • TOKYO ELECTRON LIMITED
    • Shingo MORITA
    • G01 - MEASURING TESTING
  • Information Patent Application

    SUBSTRATE INSPECTION APPARATUS
    • Publication number 20150077152
    • Publication date Mar 19, 2015
    • TOKYO ELECTRON LIMITED
    • Michio Murata
    • G01 - MEASURING TESTING