Michio Nakano

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 9,188,554
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus for inspecting patterns of a substrate
- Patent number 8,036,447
- Issue date Oct 11, 2011
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image processing unit for wafer inspection tool
- Patent number 7,889,911
- Issue date Feb 15, 2011
- Hitachi High-Technologies Corporation
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image processing unit for wafer inspection tool
- Patent number 7,421,110
- Issue date Sep 2, 2008
- Hitachi High-Technologies Corporation
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20150212019
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS FOR INSPECTING PATTERNS OF A SUBSTRATE
- Publication number 20100008564
- Publication date Jan 14, 2010
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE PROCESSING UNIT FOR WAFER INSPECTION TOOL
- Publication number 20080285841
- Publication date Nov 20, 2008
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection apparatus and an inspection method
- Publication number 20080099675
- Publication date May 1, 2008
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection apparatus for inspecting patterns of a substrate
- Publication number 20060171593
- Publication date Aug 3, 2006
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Image processing unit for wafer inspection tool
- Publication number 20040170313
- Publication date Sep 2, 2004
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING