Michio OHASHI

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measuring device, exposure device, and measurement method
- Patent number 12,345,517
- Issue date Jul 1, 2025
- Nikon Corporation
- Michio Ohashi
- G01 - MEASURING TESTING
Information Patent Grant
Surface position detection device, exposure apparatus, substrate-pr...
- Patent number 12,334,404
- Issue date Jun 17, 2025
- Nikon Corporation
- Satoshi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MEASURING DEVICE, EXPOSURE DEVICE, AND MEASUREMENT METHOD
- Publication number 20230152083
- Publication date May 18, 2023
- Nikon Corporation
- Michio OHASHI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE POSITION DETECTION DEVICE, EXPOSURE APPARATUS, SUBSTRATE-PR...
- Publication number 20220216119
- Publication date Jul 7, 2022
- Nikon Corporation
- Satoshi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS