Michio OHASHI

Follow

Person

Tokyo, JP

People

Patents Applicationslast 30 patents

Information Patent Application
MEASURING DEVICE, EXPOSURE DEVICE, AND MEASUREMENT METHOD
- Publication number 20230152083
- Publication date May 18, 2023
- Nikon Corporation
- Michio OHASHI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE POSITION DETECTION DEVICE, EXPOSURE APPARATUS, SUBSTRATE-PR...
- Publication number 20220216119
- Publication date Jul 7, 2022
- Nikon Corporation
- Satoshi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS