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Michio Tajima
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for evaluating a semiconductor substrate
Patent number
7,947,967
Issue date
May 24, 2011
Japan Aerospace Exploration Agency
Michio Tajima
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR EVALUATING A SEMICONDUCTOR SUBSTRATE
Publication number
20080213926
Publication date
Sep 4, 2008
JAPAN AEROSPACE EXPLORATION AGENCY
Michio Tajima
G01 - MEASURING TESTING