Michio Tanaka

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,674
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,673
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,862,966
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090162759
- Publication date Jun 25, 2009
- TOKYO ELECTRON LIMITED
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090104548
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090047586
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY