Michishige Aoyama

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Suzuka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method
- Patent number 5,411,631
- Issue date May 2, 1995
- Tokyo Electron Limited
- Masaru Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...