Membership
Tour
Register
Log in
Michishige Aoyama
Follow
Person
Suzuka, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Dry etching method
Patent number
5,411,631
Issue date
May 2, 1995
Tokyo Electron Limited
Masaru Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...