Membership
Tour
Register
Log in
Michitaka AMIYA
Follow
Person
Koshi City, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Flow-rate regulator device, diluted chemical-liquid supply device,...
Patent number
10,276,408
Issue date
Apr 30, 2019
Tokyo Electron Limited
Michitaka Amiya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Cleaning apparatus, substrate processing system, cleaning method, p...
Patent number
8,820,335
Issue date
Sep 2, 2014
Tokyo Electron Limited
Michitaka Amiya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FLOW-RATE REGULATOR DEVICE, DILUTED CHEMICAL-LIQUID SUPPLY DEVICE,...
Publication number
20150380280
Publication date
Dec 31, 2015
TOKYO ELECTRON LIMITED
Michitaka AMIYA
B08 - CLEANING
Information
Patent Application
CLEANING APPARATUS, SUBSTRATE PROCESSING SYSTEM, CLEANING METHOD, P...
Publication number
20100288313
Publication date
Nov 18, 2010
TOKYO ELECTRON LIMITED
Michitaka AMIYA
H01 - BASIC ELECTRIC ELEMENTS