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Michiyoshi YAMASHITA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
10,427,269
Issue date
Oct 1, 2019
Ebara Corporation
Makoto Kashiwagi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,403,505
Issue date
Sep 3, 2019
Ebara Corporation
Kenya Ito
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Polishing method involving a polishing member polishing at angle ta...
Patent number
9,630,289
Issue date
Apr 25, 2017
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method
Patent number
9,492,910
Issue date
Nov 15, 2016
Ebara Corporation
Yu Ishii
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230326757
Publication date
Oct 12, 2023
EBARA CORPORATION
Masayuki SATAKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180076043
Publication date
Mar 15, 2018
EBARA CORPORATION
Kenya ITO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20170291273
Publication date
Oct 12, 2017
EBARA CORPORATION
Makoto KASHIWAGI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD
Publication number
20160052107
Publication date
Feb 25, 2016
EBARA CORPORATION
Yu ISHII
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD
Publication number
20140094095
Publication date
Apr 3, 2014
EBARA CORPORATION
Tetsuji TOGAWA
B24 - GRINDING POLISHING