Mie Nagao

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Chita City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
- Patent number 6,975,497
- Issue date Dec 13, 2005
- NGK Insulators, Ltd.
- Mie Nagao
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
- Patent number 6,549,392
- Issue date Apr 15, 2003
- NGK Insulators, Ltd.
- Masashi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing particles from an electrostatic chuck and an eq...
- Patent number 6,252,758
- Issue date Jun 26, 2001
- NGK Insulators, Ltd.
- Mie Nagao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for reducing particles from an electrostatic chuck and an eq...
- Publication number 20010002871
- Publication date Jun 7, 2001
- NGK Insulators, Ltd.
- Mie Nagao
- H01 - BASIC ELECTRIC ELEMENTS