Miguel Angel Saldana

Person

Santa Cruz, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid precursor injection for thin film deposition
- Patent number 11,459,654
- Issue date Oct 4, 2022
- Eugenus, Inc.
- Alex Finkelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for surface preparation prior to epitaxial dep...
- Patent number 10,544,519
- Issue date Jan 28, 2020
- Aixtron SE
- Stephen Edward Savas
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION
- Publication number 20240062993
- Publication date Feb 22, 2024
- EUGENUS, INC.
- Martin J. Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION
- Publication number 20230128366
- Publication date Apr 27, 2023
- EUGENUS, INC.
- Alex Finkelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM AND METHOD FOR HIGH SPEED CYCLIC DEPOSITION
- Publication number 20220267898
- Publication date Aug 25, 2022
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION
- Publication number 20220251704
- Publication date Aug 11, 2022
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION
- Publication number 20220154332
- Publication date May 19, 2022
- EUGENUS, INC.
- Alex Finkelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Miguel Angel Saldana

Person

Patents Grantslast 30 patents

Liquid precursor injection for thin film deposition

Method and apparatus for surface preparation prior to epitaxial dep...

Patents Applicationslast 30 patents

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

TEMPERATURE-CONTROLLED SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION

LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION

PRECURSOR DELIVERY SYSTEM AND METHOD FOR HIGH SPEED CYCLIC DEPOSITION

PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION

LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION